| 微型ICP激发源及其应用 |
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| 引用本文： | 蒲永妮,刘巍伟.微型ICP激发源及其应用[J].中国仪器仪表,2010(4):54-56. |
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| 作者姓名： | 蒲永妮 刘巍伟 |
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| 作者单位： | 廊坊师范学院物电学院,河北,廊坊,065000 |
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| 摘 要： | 介绍一种新的原子发射光谱微型电感耦合等离子体(ICP)激发源,阐述这种激发源的结构、性能及其在光谱仪中的应用,它与平面结构的微型Fabry-Perot光谱仪联用可以作为微型气体分析仪使用。并简要介绍作者研制的在较低的13.56MHz下工作的微型ICP激发源。展望随着MEMS技术的发展,微型光谱仪的应用前景。
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| 关 键 词： | 微型机电系统 微型电感耦合等离子体激发源 微型Fabry-Perot光谱仪 微型气体分析仪 |
A Microfabricated ICP Source and Its Application |
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| Abstract: | A novel microfabricated inductively coupled plasma(ICP)source is introduced, the configuration and characteristics of the micro ICP source are described. The application of the source in spectrometers is illustrated, it is intended to be used in conjunction with a planar miniature Fabry-Perot spectrometer to form a micro gas analyzer. A micro ICP source developed by author is introduced briefly, which work at 13.56MHz. At last, with the development of MEMS technology, the potential application areas of micr... |
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| Keywords: | MEMS Microfabricated ICP source Miniature fabry-perot spectrometer Micro gas analyzer |
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