Nature of hyperthermal surface ionization |
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| Authors: | V. N. Ageev S. Yu. Davydov |
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| Affiliation: | (1) A. F. Ioffe Physicotechnical Institute, Russian Academy of Sciences, St. Petersburg |
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| Abstract: | A model of electron-stimulated desorption is used as the basis to propose a simple theory of hyperthermal surface relaxation of atoms at metal and semiconducting substrates. The dependence of the ion flux on the kinetic energy of the scattered atoms is obtained near the ionization threshold. Pis’ma Zh. Tekh. Fiz. 25, 6–11 (August 26, 1999) |
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