基于栅结构谐振器的X和Y轴加速度及Z轴角速度的组合测量

本文利用一由两个相互垂直的加速度计组成的栅结构谐振器来同时测量z轴和Y轴的加速度以及z轴的输入角速度．此谐振器利用变面积电容进行检测，具有良好的线性度及快速的信号响应．此谐振器的x轴及Y轴的加速度计的谐振频率分别为1．9315kHz和1．8403kHz．在初始状态下，Ⅳ轴的加速度计被驱动进入谐振状态，且Y轴的加速度随着x轴的加速度计一起振动．当=轴存在角速度输入时，Y轴的加速度计会相应地沿Y轴进行振动，而x轴及Y轴的加速度会改变相应轴上加速度计的平衡位置．测试结果表明，此器件的z轴角速度灵敏度为16mV／（（9）·s-1），x和Y轴的加速度灵敏度分别为49mV／g和244mV／g．z轴角速度输出的噪声等效角速度为0．0138（s·／Hz-1），x和Y轴加速度输出的噪声等效加速度为0．42X10-3g／／Hz和0．074X10-3。g／√Hz．

Measurement Combination of x- z-axis Angular Velocity in a and y-Axis Accelerations and Slot-Structure Resonator

can detect the x- and y-axis accelerations and the z-axis angular velocity at the same time. Variable-area sensing is adopted because of its good linearity and quick response. The resonant frequencies of the x- and y-axis accelerometers are 1. 931 5 kHz and 1. 840 3 kHz, respectively. The x-axis accelerometer is driven into resonance. The y-axis accelerometer moves together with the x-axis accelerometer and oscil-lates along the y-axis due to z-axis angular velocity. The equilibrium positions of the accelerometers change with the corresponding x- and y-axis accelerations. The test results show that the sensitivity of the z-axis angular velocity is 16 mV/（（°） .s-1） , and those of the x- and y-axis accelerations are 49 mV/g and 244 mV/g, respectively. The noise of the angular velocity output is 0. 013 8 /（ s. v/-H--1 ） for the z-axis accelerometer, and those of the acceleration velocity output are 0. 42 x 10 -3g/~ and 0. 074 x 10-ag/ for the x- and y-axis accelerometers, respectively.