| 基于LabVIEW的PVD/CVD材料生长平台真空控制系统 |
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| 引用本文： | 杨坤,周韵,邵志勇,李甫成,万能. 基于LabVIEW的PVD/CVD材料生长平台真空控制系统[J]. 电子器件, 2018, 41(3) |
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| 作者姓名： | 杨坤 周韵 邵志勇 李甫成 万能 |
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| 作者单位： | 东南大学电子科学与工程学院 |
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| 基金项目： | 教育部髙教司产学协同育人项目 |
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| 摘 要： | 为了能够实时、准确地获取PVD/CVD（物理/化学气相沉积）材料生长平台内部的真空情况，监控真空系统各个部件的运行状态，以及实现便捷安全的实验操作，设计了基于LabVIEW的PVD/CVD材料生长平台真空控制系统。该系统同时实现了气压数据曲线图表显示，仪器状态可视化监控，实验数据自动保存等功能。经实验室测试使用，效果良好，可靠性高。
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| 关 键 词： | 自动控制；虚拟仪器；LabVIEW；数据采集；真空系统； |
A PVD/CVD vacuum controlling system based on LabVIEW |
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| Abstract: | A controlling system used to control the vacuum system in PVD/CVD (physical/chemical vapor deposition) equipments was developed based on the concept of virtual instrument (LabVIEW). It realized vacuum level monitoring and auto-saving, as well as automatic controlling of different valves and pumps. It has the advantages of realtime and accurate vacuum level acquisition, realtime system status monitoring, as well as convinient software controlling. Such a system was found to be easy to use with high reliability. |
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| Keywords: | Automatic control virtual instrument LabVIEW data acquisition vacuum system |
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