氧化锌基乙醇气体传感器研制及特性研究

利用水热法合成了不同形貌的ZnO基纳米结构气敏材料，利用X射线衍射仪(XRD)和扫描电子显微镜 (SEM)对其进行了结构表征和分析。制备成旁热式气体传感器，测试了其对乙醇(C2H5OH)的气敏特性。实验结果表明：基于ZnO纳米花制作出的传感器比纳米球状传感器对C2H5OH具有更高的灵敏度，在200oC下对50ppm的C2H5OH灵敏度为34.7，是球状ZnO基传感器的1.7倍；两种ZnO基传感器对C2H5OH均表现出较好的重复性，在最佳工作温度下对C2H5OH的响应恢复时间均在15秒以内；最后对ZnO基C2H5OH气体传感器的气敏机理进行了讨论。

Fabrication and Sensing Properties of ZnO Based Ethanol Sensors

ZnO nanostructures with different morphologies were synthesized by hydrothermal method and characterized by X-ray diffraction (XRD) and scanning electron microscope (SEM). ZnO based gas sensors were fabricated with the synthesized ZnO samples for ethanol (C2H5OH) sensing. The experimental results show that the fabricated ZnO nanoflowers sensor has a higher sensitivity than the ZnO nanosphere sensor, and its sensing response to 50ppm C2H5OH gas is 34.7 at 200oC. Both kinds of ZnO based sensors exhibit good reproducibility to C2H5OH at their optimum working temperatures, and the corresponding response and recovery time are within 15 seconds. Finally, the sensing mechanism of ZnO based sensors to C2H5OH was discussed.