ESD对RuO2厚膜电阻阻值的影响

采用静电放电(Electrostatic discharge,ESD)发生器对RuO2厚膜电阻直接放电,研究了电阻阻值变化率与电阻尺寸、阻值和ESD条件的关系。结果表明:厚膜电阻阻值受ESD作用而下降;相同ESD及阻值条件下的阻值变化率随电阻尺寸的增大而减小;相同电阻的阻值变化率随ESD电压的增大而增大;10kΩ左右的厚膜电阻在ESD作用下的阻值变化率最大,阻值变化率随着阻值的减小和增大而呈减小趋势;对10kΩ厚膜电阻反复施加不断增大的ESD电压,除宽度尺寸为0.45mm的电阻阻值在8～10kV之间出现一次回升外,电阻阻值逐步下降。

Effects of ESD on Resistance Value of RuO2 Thick Film Resistor

Using electrostatic discharge（ ESD ） generator directly discharge on RuO~ thick film resistor,the relations between resistance variation of resistor and resistive size,resistance value and ESD condition were investigated.The results show that the resistance value decreased under the effects of ESD;the resistance variation decreased as the size of the resistor is larger under the same ESD condition and the same resistance value;the resistance variation of the same resistor increased as the ESD voltage is increasing;the resistance variation of thick film resistor with more or less 10kΩ resistance value under the effects of ESD is the largest,and the resistance variation trended to decrease as the resistance value of the resistor is smaller or larger than 10kΩ .By applying repeated and increasing ESD voltage on the thick film resistor with the resistance value of 10kΩ,the resistance value decreased step by step,except the resistance value of the resistor with 0.45mm resistive width was picked up for once while with the ESD voltage from 8kV to 10kV.