| 溶胶凝胶法制备闪耀光栅及特性研究 |
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| 引用本文： | 刘春泽,周斌,徐翔,杜艾,叶君建,张志华,吴广明,沈军.溶胶凝胶法制备闪耀光栅及特性研究[J].功能材料,2007,38(A01):425-428. |
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| 作者姓名： | 刘春泽 周斌 徐翔 杜艾 叶君建 张志华 吴广明 沈军 |
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| 作者单位： | 同济大学波耳固体物理研究所,上海200092 |
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| 基金项目： | 基金项目：上海市纳米专项资助项目（0452nm088）上海科技启明星计划资助项目（05QMX1454） |
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| 摘 要： | 采用一步催化法，制备ZrO2光敏溶胶，用提拉法形成了单层光敏凝胶膜。采用紫外光刻技术，将掩摸图形转移到光敏凝胶膜上，通过曝光角度的控制，实现具有一定倾角的闪耀光栅制备，以紫外分光光度计，红外分光光度计，原子力显微镜等方法对光敏凝胶膜及光栅图形进行了性能测试及表征。并用355nm激光系统进行衍射效率及激光损伤阈值测定。获得了周期为2μm，高度为60nm，闪耀角为3°的闪耀光栅。
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| 关 键 词： | 溶胶-凝胶 鳌合环 闪耀光栅 ZrO2 |
| 文章编号： | 1001-9731（2007）增刊-0425-04 |
| 修稿时间： | 2007-06-15 |
Sol-gel used for preparation of blazed grating |
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| LIU Chun-ze, ZHU Bin, XU Xiang, DU Ai, YE Jun-jian, ZHANG Zhi-hua, WU Guang-ming, SHEN Jun.Sol-gel used for preparation of blazed grating[J].Journal of Functional Materials,2007,38(A01):425-428. |
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| Authors: | LIU Chun-ze ZHU Bin XU Xiang DU Ai YE Jun-jian ZHANG Zhi-hua WU Guang-ming SHEN Jun |
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| Affiliation: | Pohl Institute of Solid State Physics, Tongji University, Shanghai 200092, China |
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| Abstract: | A negative tone sol-gel material was applied to the fabrication of blazed grating by UV direct writing lithography. The one-step process was used to prepare ZrO2 photosensitive sol. The negative tone gel film was irradiated with high pressure mercury lamp through the mask and leached in ethyl alcohol. The surface profile was direct controlled by the UV exposure dosage and angel of incidence. As an example, a blazed grating with a period of 21an and height of 60nm was fabricated. |
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| Keywords: | sol-gel chelate ring blazed gratingl ZrO2 |
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