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| 海绵卷绕真空磁控溅射镀膜过程中的传动控制 | |
| 引用本文： | 孙清,魏海波,池世春,栾居里.海绵卷绕真空磁控溅射镀膜过程中的传动控制[J].真空,2006,43(5):53-55. |
| 作者姓名： | 孙清 魏海波 池世春 栾居里 |
| 作者单位： | 1. 沈阳药科大学高等职业技术学院,辽宁,沈阳,110026 2. 沈阳新北方玻璃有限公司,辽宁,沈阳,110136 3. 中科院沈阳自动化研究所现代装备研究设计中心,辽宁,沈阳,110016 4. 沈阳职业技术学院,辽宁,沈阳,110045 |
| 摘 要： | 根据磁控溅射中海绵的传动特性，建立了传动控制的数学模型，采用带有矢量的变频调速器实现了海绵卷绕真空镀膜过程中的张力控制，满足了磁控溅射中海绵卷绕的传动要求。 |
| 关 键 词： | 变频调速 张力控制 矢量控制 海绵卷绕系统 |
| 文章编号： | 1002-0322（2006）05-0053-03 |
| 收稿时间： | 2006-01-18 |
| 修稿时间： | 2006-01-18 |
Transfer motion control of sponge coil during vacuum magnetron sputtering film coating |
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| SUN Qing,WEI Hai-bo,CHI Shi-chun,LUAN Ju-li.Transfer motion control of sponge coil during vacuum magnetron sputtering film coating[J].Vacuum,2006,43(5):53-55. | |
| Authors: | SUN Qing WEI Hai-bo CHI Shi-chun LUAN Ju-li |
| Abstract: | A mathematic model was developed for the transfer motion control of a sponge coil in vacuum magnetron sputtering film coating process, according to the properties of sponge coil during coiling/decoiling operation which rquires no-tension transfer motion. To control the tension of sponge tape during coiling/decoiling, vector frequency converters were used to meet the no-tension requirement. |
| Keywords: | speed regulation frequency converter tension control vector control sponge coiling/decoiling system |
| 本文献已被 CNKI 维普 万方数据 等数据库收录！ | |