| 四元阵型MEMS矢量水听器微结构设计 |
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| 引用本文： | 郭静,张国军,刘源,王续博,张文栋. 四元阵型MEMS矢量水听器微结构设计[J]. 传感技术学报, 2016, 29(2): 171-176. DOI: 10.3969/j.issn.1004-1699.2016.02.004 |
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| 作者姓名： | 郭静 张国军 刘源 王续博 张文栋 |
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| 作者单位： | 中北大学仪器科学与动态测试教育部重点实验室，太原030051;中北大学电子测试技术重点实验室，太原030051;中北大学仪器科学与动态测试教育部重点实验室,太原,030051 |
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| 基金项目： | 应用于海底长期观测网的纳机电矢量水听器项目(2013AA09A412)；基于纳机电矢量水听器面阵的水下目标成像机理技术研究项目(61127008/F040703) |
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| 摘 要： | 针对当前的MEMS矢量水听器存在左右舷模糊问题，提出了一种四元阵型MEMS矢量水听器微结构。首先，从理论上分析了当前的MEMS矢量水听器左右舷模糊问题，从而提出了可消除左右舷模糊的四元阵型MEMS矢量水听器微结构。其次，对四元阵型MEMS矢量水听器微结构进行有限元仿真，声源方向可以通过分析各阵元应力分布情况而唯一确定。最后，通过驻波声场试验验证其可行性，结果表明，该微结构可实现左右舷分辨，有效消除左右舷模糊。
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| 关 键 词： | MEMS 左右舷模糊 Ansys 矢量水听器 |
Design of four-element array MEMS vector hydrophone |
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| GUO Jing,ZHANG Guojun,LIU Yuan,WANG Xubo,ZHANG Wendong. Design of four-element array MEMS vector hydrophone[J]. Journal of Transduction Technology, 2016, 29(2): 171-176. DOI: 10.3969/j.issn.1004-1699.2016.02.004 |
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| Authors: | GUO Jing ZHANG Guojun LIU Yuan WANG Xubo ZHANG Wendong |
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| Abstract: | To solve the existence problem of port/starboard blur when using single MEMS vector hydrophone,a new four-element array MEMS vector hydrophone microstructure has been presented. Firstly,the cause of port/starboard blur of the current MEMS vector hydrophone was analyzed theoretically and a novel four-element array microstruc?ture was proposed,which can solve the problem of port/starboard blur. Secondly,the function of novel microstruc?ture was verified through finite element method,which shown that the direction of sound source could be ascer?tained accurately. Finally,environmental test wasdone using the standing wave tube,and the results show that the four-element array microstructure can help to deal with the challenging of port/starboard blur. |
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| Keywords: | MEMS port/starboard blur Ansys vector hydrophone |
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