基于MEMS技术的双凸台微型热电能量采集器的仿真和制备

基于KOH腐蚀工艺设计并制作了具有双凸台结构的微型热电能量采集器，运用有限元法仿真器件在一定温差下的温度分布；并对器件建立了数学模型，分析凸台结构的几何参数等对器件输出性能的影响。仿真结果表明：随着顶部凸台高度的增加，温差的有效利用率逐渐升高；随着顶部凸台边长的增加，有效温差利用率逐渐降低；随着热冷端热阻的减小，器件的有效利用温差、开路电压、回路电流、输出功率都逐渐升高。从工艺上证明，基于MEMS技术的双凸台结构的微型热电能量采集器是可以加工和制备的。

Simulation and Fabrication of MEMS Thermoelectric Generator with Two Boss-shaped Bodies

Based on the KOH etching,micro thermoelectric generator with two boss-shaped bodies is designed and fabricated in this paper. When the thermoelectric generator is placed in a certain temperature difference,its temper?ature distribution is simulated by the finite element method. Meanwhile,we conduct the mathematical modeling of the micro thermoelectric generator and simulate its output performance with its different geometrical dimensions. By curves analysis and theoretical derivation,it is obvious that the utilization rate of the temperature difference can be improved by increasing the height of the top boss-shaped body and decreased by increasing the side length of the top boss-shaped body. And it is known that the effective temperature difference,the open-circuit voltage,the loop?current,the output power are improved by decreasing the thermal resistance of the hot side(or the cool side). The MEMS thermoelectric generator with two boss-shaped bodies has been already successfully fabricated.