Measurement of the divergence angle of the electron microprobe of a scanning electron microscope

A method of measuring the divergence angle of the electron microprobe of a scanning electron microscope is developed. The method has been tested on the model PHI-650 scanning electron microscope. The divergence angle of the microprobe amounts to 1.4±0.2 mradian. Translated from Izmeritel'naya Tekhnika, No. 12, pp. 26–28, December, 1996.