基于FMECA的ZQJ-291H型氦质谱检漏仪可靠性分析

本文通过故障模式影响及危害性分析的方法对ZQJ-291H型氦质谱检漏仪各组成部分的不同故障进行分析,研究其对系统工作状态的影响。意在识别设备使用过程中的薄弱环节,为该型氦质谱检漏仪的设计、制造、使用等环节提高可靠性的改进提供有效依据。研究结果表明,影响ZQJ-291H型氦质谱检漏仪可靠性的主要因素为泵油退化和离子源老化,因此建议对离子源损耗方面加大研究力度,进而提高检漏仪的可靠性。

Reliability analysis of ZQJ-291H helium mass spectrometer leak detector based on FMECA

This paper analyzed the different faults of various components of the ZQJ-291H helium mass spectrometer leak detector by means of the failure mode effect and hazard analysis method, and studied the influence on the working status of the system. It is intended to identify the weakness in the use of equipment and provides an effective basis for improving the reliability of this type of helium mass spectrometer leak detector in terms of design, manufacture and use. The results show that the main factors, which affect the reliability of the ZQJ-291H helium mass spectrometer leak detector are the degradation of the pump oil and the aging of the ion source. Therefore, it is recommended to increase the research efforts on the loss of ion source and thus improve the reliability of the leak detector.