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基于QFD和DOE的反光镜膜层表面缺陷改进研究
引用本文:赵陨,穆佳丽,李明华,李文龙,姚春龙.基于QFD和DOE的反光镜膜层表面缺陷改进研究[J].真空,2019(3):32-36.
作者姓名:赵陨  穆佳丽  李明华  李文龙  姚春龙
作者单位:沈阳仪表科学研究院有限公司
基金项目:沈阳仪表科学研究院有限公司科研基金项目(Y1020-8071)
摘    要:本文以光学反光镜为研究对象,通过QFD(Quality Function Deployment)获取顾客对光学反光镜膜层质量需求以及产品生产过程中所产生的质量缺陷统计,结合光学反光镜镀膜工艺,将这些需求以质量屋的形式转换为薄膜镀制过程中影响膜层质量的众多工艺因素,运用DOE(Desiqn of Experiment)试验方法对关键工艺因素进行优化设计、试验过程实施,试验结果采用检验测试、极差分析等方法进行分析,最终获得针对膜层表面缺陷改进的最优工艺参数组合。经试验验证,所构建的顾客需求为导向的QFD和DOE集成改进模型在反光镜膜层表面性能缺陷改进方面均取得了较好的实际应用效果。

关 键 词:质量功能展开  试验设计  反光镜  膜层质量

Research on improvement of film surface defects of reflectors based on QFD and DOE
ZHAO Yun,MU Jia-li,LI Ming-hua,LI Wen-long,YAO Chun-long.Research on improvement of film surface defects of reflectors based on QFD and DOE[J].Vacuum,2019(3):32-36.
Authors:ZHAO Yun  MU Jia-li  LI Ming-hua  LI Wen-long  YAO Chun-long
Affiliation:(Shenyang A cade my of Instrumental ion Science Co.,Ltd,Shenyang 110043,China)
Abstract:In this paper, the optical reflector was chosen as the research object. The customer requirements on the optical reflector film quality and the quality flaw producted in production process were obtained by QFD. Combined with the optical mirror coating process, the demand in the form of quality house was transformed to process factors that affect the film surface defects of plating process for thin films. The design of key process factors and test process were optimization by using DOE test method. The results were analyzed by means of test and the range analysis method. The optimal combination of process parameters was thus obtained to prevent film surface defects. The experimental results show that the integrated improved model of QFD and DOE can achieve good practical application effect in the surface performance of reflector film.
Keywords:quality function deployment  design of experiment  reflector  film quality
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