Study of the actuation speed,bounces occurrences,and contact reliability of ohmic RF-MEMS switches |
| |
| Authors: | A. Tazzoli M. Barbato F. Mattiuzzo V. Ritrovato G. Meneghesso |
| |
| Affiliation: | 1. Faculty of Engineering, Computing and Science, Swinburne University of Technology (Sarawak Campus), Kuching, Sarawak, Malaysia;1. Department of Industrial Engineering, University of Catania, Viale A. Doria, 6, 95125 Catania, Italy;2. Department of Chemistry, University “Sapienza” of Rome, P.le A. Moro 5, 00185 Rome, Italy;1. Institute of Chemical Physics, University of Latvia, Riga, 19 Raina Blvd., LV 1586, Latvia;2. Department of Chemistry, University of Latvia, Riga, 1 Jelgavas Str., LV 1004, Latvia;3. CRANN & AMBER, Trinity College Dublin, Dublin 2, Ireland;4. Department of Chemistry and Tyndall National Institute, University College Cork, Cork, Ireland |
| |
| Abstract: | The influence of the bias signal waveform on the electromechanical dynamic response of ohmic RF-MEMS switches is here investigated by means of electromechanical characterizations and modelling procedures. The actuation transient of ohmic RF-MEMS switches was studied in this work developing a fast to compute, but comprehensive electromechanical model, using electromechanical parameters from experimental results. The developed model was then used to investigate how different bias waveforms influence the switch dynamic, in terms of actuation time, and bounces occurrences, and a practical solution to limit bounces, without compromising the actuation time was presented. Furthermore, it was demonstrated how it is possible to improve the reliability to cycling stress using ad hoc shaped bias signals. |
| |
| Keywords: | |
| 本文献已被 ScienceDirect 等数据库收录！ |
|
