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Interferometric fabrication of modulated submicrometer gratings in photoresist
Authors:Ehbets P  Herzig H P  Nussbaum P  Blattner P  Ndliker R D
Abstract:Interferometric recording is applied to the fabrication of modulated submicrometer gratings in photoresist.High diffraction efficiency requires optimized recording conditions, which are obtained by the use of an on-axis continuous surface-relief grating for the generation of the object beam. The optimized phase function is copied into the resist layer by means of a self-aligned two-step recording process with an intermediate copy in a volume photopolymer hologram. As a result, we demonstrate high carrier frequency surface-relief off-axis fan-out gratings for illumination in transmission with visible light.
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