MEMS红外探测器响应时间测量方法研究

传统地，MEMS红外探测器响应时间的测量需要基于黑体辐射源、斩波器、水冷装置等设备搭建一套复杂的测量系统，然而斩波器的遮挡区域和透光区域具有一定的面积，其按某频率工作时会消耗一定的时间，而测试所得的器件响应时间无法排除斩波器的工作耗时，导致测试结果存在较大误差，所测响应时间为14.46ms。为解决这一问题，提出了一种以钛宝石激光器为辐射光源，利用声光调制器构建纳秒级激光脉冲，MEMS红外探测器响应激光脉冲的作用输出脉冲电信号，很好地规避了测量系统中设备工作耗时引入的时间参数，所测响应时间仅为3.13ms。由此可见，传统方法中斩波器工作耗时引入的时间误差甚至超过器件响应时间的300%，充分证明了此方法可以有效解决这一问题，进而为MEMS红外探测器以及其它光学探测器性能参数的测试与计量提供了一种新的方法。

A response time measurement method For MEMS IR Detectors

As is known, response time of a MEMS infrared (IR) detector is usually measured using a complicated measurement system consisting of a blackbody radiation source, a chopper and a water-cooling apparatus. For such a system, both blocking and hollow patterns in the chopper have certain areas, which consume a certain part of time when the chopper spins at a certain frequency. In conventional measurements of response time, however, it is difficult to exclude the time consumed by a chopper, as a result, a large error is usually introduced into the system. To address such an issue, a response time measurement system for MEMS IR detectors using a fast-pulse laser as its radiation source is proposed in this work. Such a system is able to avoid extra time parameter being introduced by equipment . For a thermopile IR detector, response time measured based on traditional method is 14.46ms, while based on the newly established system, the response time is only 3.13ms. This indicates that the new method can perfectly avoid a 300% time error introduced by the traditional method.