Optical constants of Er_2O_3-Al_2O_3 films studied by spectroscopic ellipsometry |
| |
| Authors: | ZHU Yanyan FANG Zebo XU Run |
| |
| Affiliation: | ZHU Yanyan1,FANG Zebo2,XU Run3(1.Department of Mathematics and Physics,Shanghai University of Electric Power,Shanghai 200090,China,2.Department of Physics,Shaoxing University,Shaoxing312000,3.School of Materials Science and Engineering,Shanghai University,Shanghai 200072,China) |
| |
| Abstract: | Er2O3-Al2O3 film was deposited on the Si(001) substrate by radio frequency magnetron technique at room temperature.The samplewas annealed at 450,600 and 750 oC for 30 min in O2 ambience,respectively.The optical constants were studied by spectroscopic ellipsometryfor both the as-deposited and the annealed samples.The proper values of refractive index indicated that it could be a useful material for solar cells. |
| |
| Keywords: | optical properties rare earth oxides solar cells |
| 本文献已被 CNKI 维普 等数据库收录！ |
|
