双成象单元扫描探针显微镜在纳米计量中的应用

研制了用于纳米计量的双成象单元扫描隧道显微镜一原子力显微镜，由扫描隧道显微镜参考单元和原子力显微镜被测单元组合而成。两者共用同一XY扫描器，同时对参考样品石墨和被测样品扫描成象。得到的石墨原子晶格参考图象与被测样品图象横向尺度相同，计数前者的原子晶格个数，即可精确测定被测样品图象的尺寸。利用本方法可对任何样品表面的超微观结构进行严格的纳米计量。

Dual Imaging Unit Scanning Probe Microscopes for Nanometer Order Metrology

A dual imaging unit scanning tunneling microscope-atomic force microscope(STM-AFM ) was developed for nanometer order metrology. It consists of a reference STMunit and a test AFM unit. The two units simu1taneously image the crystalline lattice of thereference graphite and the test sample by using one single XY scanner. The two scanned im-ages are thus of the same lateral size,and the length of test sample image can be preciselymeasured by c0unting the number of lattices. This system enables nanometer order metrologyof microstructures with any conductivity.