| OLD诊断SiH_4的LPCVD动力学过程 |
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| 引用本文： | 傅广生,李晓苇,韩理,张连水,董丽芳,吕福润,薛春银.OLD诊断SiH_4的LPCVD动力学过程[J].中国激光,1987,14(11):671-673. |
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| 作者姓名： | 傅广生 李晓苇 韩理 张连水 董丽芳 吕福润 薛春银 |
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| 作者单位： | 河北大学物理系
(傅广生，李晓苇，韩理，张连水，董丽芳，吕福润)，河北大学物理系(薛春银) |
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| 摘 要： | 用光声激光偏转(OLD)测量了强TEA CO_2脉冲激光辐照SiH_4-H_2系统产生等离子体淀积(LPCVD)硅薄膜过程中的激波效应,证明激光击穿SiH_4诱发的激波效应是LPCVD中基本的气体动力学过程,并讨论了激波对膜生长的影响。
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| 收稿时间： | 1986/9/1 |
Diagnosis of kinetic process in silane LPCVD by means of OLD |
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| Abstract: | The shock wave in SiH4 laser plasma chemical vapour deposition (LPCVD) are measured byoptoacoustic laser deflection (OLD) technique. The result shows that the shock wars induced by laser gas breakdown is the basic gaa kinetic process in LPGVD. Also discussed is its influence on thin film growth. |
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