工艺变化下互连线分布参数随机建模与延迟分析

随着超大规模集成电路制造进入深亚微米和超深亚微米阶段,电路制造过程中的工艺变化已经成为影响集成电路互连线传输性能的重要因素.文中引入高斯白噪声建立了互连线分布参数的随机模型,并提出基于Elmore延迟度量的工艺变化下的互连延迟估计式;通过简化工艺变化量与互连线参数之间的关系式,对延迟一阶变化量与二阶变化量进行了分析,给出一般工艺变化下互连延迟的统计特性计算方法;另,针对线宽工艺变化推导出互连延迟均值与方差的计算公式.最后通过仿真实验对工艺变化下互连线延迟分析方法及其统计特性计算公式的有效性进行了验证.

Stochastic modeling of distributed parameters and analysis of interconnect delay in the presence of process variations

With very large scale integrated circuits manufacturing entering the deep-sub-micron and super deep-sub-micron scale,process variations during circuit manufacturing have become an important factor which affects the transmission performance of interconnects in the integrated circuits.With the introduction of Gauss white noise this paper proposes the stochastic model of distributed parameters,and the interconnect delay formula affected by process variations is presented,which is based on Elmore delay.By simpl...