一种离子流束斑形状的快速检测方法

针对当前质谱仪研制及调试过程中离子束斑形状检测方法繁琐、效率低等问题，提出一种快速、实时的检测方法。该方法在传统刀边法的基础上，采用多角度切割线包围成图原理，即分别在0°、45°、90°、135°方向移动锋利刀边“切割”离子束，得出离子流强度变化曲线，最终还原离子束斑形状及束流核心区域。通过自行搭建的测试平台，将该方法得到的束斑形状与离子轰击痕迹法的结果进行对比，结果表明，采用本方法检测得到的离子束斑形状及核心区域与离子轰击痕迹法基本一致，但较后者操作简单、省时高效，可实现实时检测。

Fast Measurement Method of Ion Beam Spot

In order to solve the difficult problem of ion beam spot measurement and profiling in research and adjustment of mass spectrometers, such as low efficiency, tedious process, difficult operation and so on,a method of fast beam spot shape measurement was proposed. Based on the conventional knife-edge method, a multi-angle cutting-line image forming principle was developed. Through sharp knife edge "cutting" ion beam in 0° , 45° , 90° and 135° directions respectively, ion current intensity curves were obtained. Finally, the image of ion beam spot shape and core area could be formed. Through the self-built experimental platform, the ion beam spot shape and core area of this method were compared with that of ion bombardment imaging method. Experiments show that the results of multi-angle cutting-line image forming method are in close agreement with ion bombardment imaging method one. However, this method is of simple operation, time saving and high efficiency, which can realize real-time detection.