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F+离子注入诱导应变层InGaAsP/InGaAs多量子阱结构无序的光荧光
引用本文:赵杰,王永晨.F+离子注入诱导应变层InGaAsP/InGaAs多量子阱结构无序的光荧光[J].半导体光电,1993,14(3):263-268.
作者姓名:赵杰  王永晨
作者单位:天津师范大学物理系,天津师范大学实验中心,天津师范大学物理系 副教授 天津300074,天津300074
摘    要:本文研究了F~+离子注入诱导InGaAsP/InGaAs多量子阱结构,并着重研究了晶格匹配和失配应力对F~+离子注入诱导无序的影响,用变温光荧光(13~300K)方法研究了和带隙直接有关的光荧光峰值随温度变化的规律。在13K条件下,F~-离子注入具有压应力应变层的样品导致光荧光峰产生35meV的蓝移,而对具有张应力的样品,仅产生8meV的蓝移。定性地分析了产生不同程度蓝移的原因。

关 键 词:离子注入  量子阱结构  化合物半导体

Photoluminescence Study on F~+ Implantation Induced Disordering in InGaAs/InGaAsP Strained Multiple Quantum Wells Structures
Zhao Jie,Wang Yuongchen,Li Dejun.Photoluminescence Study on F~+ Implantation Induced Disordering in InGaAs/InGaAsP Strained Multiple Quantum Wells Structures[J].Semiconductor Optoelectronics,1993,14(3):263-268.
Authors:Zhao Jie  Wang Yuongchen  Li Dejun
Affiliation:Zhao Jie,Wang Yuongchen,Li Dejun Department of Physics,Tianjin Normal University,Tianjin 300074
Abstract:The effect of strain on F~+-implantation induced compositional disor- dering in InGaAs/InGaAsP strained layer multiple quantum wells (MQW)structure is investigated.The temperature dependence of photoluminescence peak energy was measured and compared for structures with tensile,compressive strained and un- strained MQWs.At 14K,the biggest blue-shift(35meV)was obtained from the com- pressive strained structure and the smallest one(8meV)from the tensile strained structure.The effect of the strain with different forms on implantat ion induced compositional disordering is qualitatively explained.
Keywords:Implantation Induced Disordering  Compressive and lensne Strained Layer  MQW Structure
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