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Fabrication of nanoscale patterns in lithium fluoride crystal using a 13.5 nm Schwarzschild objective and a laser produced plasma source |
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| Authors: | Wang Xin Mu Baozhong Jiang Li Zhu Jingtao Yi Shengzhen Wang Zhanshan He Pengfei |
| Affiliation: | Key Laboratory of Advanced Micro-structured Materials, MOE, Department of Physics, Institute of Precision Optical Engineering, Tongji University, Shanghai 200092, China. |
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