Optical zooming interferometer for subnanometer positioning using an optical frequency comb |
| |
| Authors: | Kajima Mariko Minoshima Kaoru |
| |
| Affiliation: | National Institute of Advanced Industrial Science and Technology, 1-1-1 Umezono, Tsukuba 305-8563, Ibaraki, Japan. m.kajima@aist.go.jp |
| |
| Abstract: | A high-precision positioning stage based on an optical zooming interferometer is proposed. Two external-cavity diode lasers, stabilized to a femtosecond optical frequency comb, are used as optical sources. The zooming principle is demonstrated, and the positioning resolution of 0.2 nm is achieved. The positioning accuracy was partly evaluated. |
| |
| Keywords: | |
| 本文献已被 PubMed 等数据库收录！ |
|
