| 铁基多层纳米磁性薄膜的组织与性能 |
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| 引用本文： | 王军,尤富强,殷俊林,严彪.铁基多层纳米磁性薄膜的组织与性能[J].热处理,2006,21(4):43-45. |
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| 作者姓名： | 王军 尤富强 殷俊林 严彪 |
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| 作者单位： | 同济大学材料学院金属基材料研究所,上海,200092;上海市金属功能材料重点实验室,上海,200092 |
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| 基金项目： | 上海市科委资助项目;同济大学校科研和教改项目 |
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| 摘 要： | 利用溅射技术制备了铁基多层纳米磁性薄膜，通过溅射参数的调整，可以精确地控制薄膜的厚度。然后对薄膜进行退火处理，使薄膜晶化。最后，对薄膜磁性能进行了测量，得到了较好的结果。
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| 关 键 词： | 磁性薄膜 性能 组织 溅射 |
| 文章编号： | 1008-1690（2006）04-0043-003 |
| 收稿时间： | 2006-11-03 |
| 修稿时间： | 2006年11月3日 |
Microstructure and Properties of Ferrous Magnetic Nano-films |
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| WANG Jun,YOU Fu-qiang,YIN Jun-lin,YAN Biao.Microstructure and Properties of Ferrous Magnetic Nano-films[J].Heat Treatment,2006,21(4):43-45. |
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| Authors: | WANG Jun YOU Fu-qiang YIN Jun-lin YAN Biao |
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| Affiliation: | 1.Institute of Metal-Based Materials, College of Materials Science and Engineering, Tongji University, Shanghai 200092; 2.Shanghai Key Laboratory of Metal Function Materials Research and Application, Shanghai 200092 |
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| Abstract: | Ferrous magnetic nano-films were got by sputtering technology. The thickness of film can be precisely controlled by adjusting the parameter of sputtering process, and then the films became crystals by means of annealing. At last, the magnetic properties of the films were measured, with the result being satisfactory. |
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| Keywords: | magnetic nano-films property microstructure sputtering |
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