| TiN基纳米复合超硬薄膜的摩擦磨损特性 |
| |
| 引用本文： | 马大衍,马胜利,徐可为.TiN基纳米复合超硬薄膜的摩擦磨损特性[J].中国表面工程,2004,17(2):18-25. |
| |
| 作者姓名： | 马大衍 马胜利 徐可为 |
| |
| 作者单位： | 西安交通大学,金属材料强度国家重点实验室,陕西,西安,710049 |
| |
| 基金项目： | 国家自然科学基金(50371067)、国家863计划(2001AA338010) |
| |
| 摘 要： | 分别用磁控溅射、脉冲直流和射频等离子体辅助化学气相沉积(PCVD)技术得到了TiN、TiSiN、TiBN及Ti-C-N纳米复合超硬薄膜。用球盘式摩擦磨损试验考察了各种薄膜的磨损特性。结果表明此类纳米复合超硬薄膜的抗磨损性能比单纯的TiN薄膜有显著提高,但复合薄膜的室温摩擦因数较高,高温下摩擦因数也仅有轻微降低,可能由于表层生成减摩氧化层所致。特别对于TiSiN薄膜,随薄膜中Si含量的上升,其耐磨损性能有所下降。
|
| 关 键 词： | TiN 纳米 薄膜 摩擦磨损特性 |
| 文章编号： | 1007-9289(2004)02-0018-08 |
| 修稿时间： | 2003年12月15 |
The Tribological Behavior of Superhard Nanocomposite Films Based on TiN |
| |
| MA da-yan,MA Sheng-li,XU Ke-wei.The Tribological Behavior of Superhard Nanocomposite Films Based on TiN[J].China Surface Engineering,2004,17(2):18-25. |
| |
| Authors: | MA da-yan MA Sheng-li XU Ke-wei |
| |
| Abstract: | TiN,TiSiN ,TiBN and TiCN coatings were deposited respectively by pulsed PCVD ,R.F. PCVD and RMS. The room and high temperature tribological behaviors of the two coatings were studied using a ball-on-disc tester. Compared with TiN, the wear resistant properties of nanocomposite coatings were remarkably increased, all the coatings showed relatively low friction coefficient at high temperature, probably due to the lubricating effect of oxides formed before or during the friction process. Especially, the wear resistant properties of TiSiN nanocomposite coatings were decreased with increasing of Si content. |
| |
| Keywords: | TiN nano thin film tribological behavior |
| 本文献已被 CNKI 维普 万方数据 等数据库收录！ |
| 点击此处可从《中国表面工程》浏览原始摘要信息 |
|
点击此处可从《中国表面工程》下载全文 |
|
