Multiple-wavelength vertical-cavity surface-emitting laser arrays with a record wavelength span

Multiple-wavelength vertical-cavity surface-emitting laser (VCSEL) arrays are fabricated using a modified patterned-substrate growth technique in a molecular beam epitaxy (MBE) system. We achieved a large lasing wavelength span of 62.7 nm and highly uniform threshold currents with an average of 2.16/spl plusmn/0.81 mA. High repeatibility of wavelength spacing between 15 arrays with sharp wavelength shift rate 117.14 nm/mm is achieved.