Nucleation studies of pulsed bias enhanced CVD of diamond on biomaterials |
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Authors: | A N Jones W Ahmed C A Rego M J Jackson R Hall |
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Affiliation: | (1) Dalton Research Institute, Manchester Metropolitan University, Manchester, U.K.;(2) Birck Nanotechnology Center, Purdue University, 47907 West Lafayette, IN;(3) Advanced Energy Industries UK Ltd., Bicester, U.K. |
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Abstract: | The effects of bias voltage, bias time, frequency, and duty cycle on the nucleation of diamond were investigated. Pulsed duty
cycles were 0.4 μs, and the frequency varied between 0 and 100 kHz. The substrates were pretreated by a direct current (dc)
bias using 3 vol. % CH4 in Ar/H2 plasma. Growth and surface roughness were controlled using pulsed frequencies, with mean R
a values of 20 nm. Films were characterized in terms of orientation and surface roughness using transmission electron microscopy
and atomic force microscopy. Bias-enhanced nucleation is shown to profoundly increase the nucleation densities by promoting
ion bombardment of the substrate surface, thus creating nucleation sites for subsequent growth on substrates such as titanium
alloys and steel. This technology promotes smooth diamond facets without abrasive surface damage. Controlling the surface
roughness and morphology is of critical importance for many new biomedical and electronic devices.
This paper was presented at the fourth International Surface Engineering Congress and Exposition held August 1–3, 2005 in
St. Paul, MN. |
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Keywords: | bias-enhanced nucleation (BEN) biocompatibility chemical vapor deposition (CVD) diamond growth and characterization nanocrystalline |
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