Characteristics of PMW-PNN-PT-PZ thick films on various bottom electrodes |
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| Authors: | Sang-Jong Kim Chong-Yun Kang Ji-Won Choi Hyun-Jai Kim Man-Young Sung Seok-Jin Yoon |
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| Affiliation: | (1) Thin Film Material Research Center, Korea Institute of Science and Technology, Korea;(2) Department of Electrical Engineering, Korea University, Korea |
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| Abstract: | Characteristics of piezoelectric thick films on various bottom electrodes prepared by screen printing method were investigated.
The composition of the ceramics used in this study was 0.01Pb(Mg1/2W1/2)O3–0.41Pb(Ni1/3Nb2/3)O3–0.35PbTiO3–0.23PbZrO3 + 0.1wt% Y2O3 +2.0 wt.%ZnO(PMW-PNN-PT-PZ). The Ag and the Ag-Pd electrodes were coated on SiO2/Si substrate by screen printing method and Pt electrode was deposited on Ti/ SiO2/Si substrate by DC sputtering system. The piezoelectric PMW-PNN-PT-PZ thick films were fabricated on each electrode and annealed
by rapid thermal annealing (RTA). The PMW-PNN-PT-PZ piezoelectric thick films on Ag/SiO2/Si has higher remanent polarization (P
r) of 22.4 μC/cm2. |
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| Keywords: | Piezoelectric Thick film Screen printing method Rapid thermal annealing |
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