Measurement of the Hardness of Thin Films |
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| Authors: | Bykov Yu. A. Karpukhin S. D. Panfilov Yu. V. Boichenko M. K. Cheptsov V. O. Osipov A. V. |
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| Affiliation: | 1. N. é. Bauman Moscow State Technical University, Moscow, Russia
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| Abstract: | A method for evaluating the hardness of coatings with nanosize thickness is suggested. The method includes the determination of the hardness of the “coating-substrate” composition by indenting the coating and subsequent computation of the hardness with the use of the additivity rule. This requires determination of the thickness of the coating, of the hardness of the substrate, and of the indentation depth. |
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