Design of due-date oriented look-ahead batching rule in wafer fabrication |
| |
Authors: | D Y Sha Sheng-Yuan Hsu X D Lai |
| |
Affiliation: | (1) Department of Industrial Engineering and Management, National Chiao Tung University, Hsin-Chu, Taiwan, Republic of China;(2) Institute of Business Administration, Asia University, Taichung, Taiwan, Republic of China;(3) Department of Industrial Engineering and Management, Chienkuo Technology University, No.1, Chieh-Sou N. Rd., Changhua, 500, Taiwan, Republic of China |
| |
Abstract: | In wafer fabrication processes, batch processing accounts for over 30% of the overall processing time. And it’s a trade-off
between machine utilization and wafer waiting time. Therefore, batch machines have become one of the constraint resources
during wafer fabrication. How to maintain the utilization and reduce the waiting time are important tasks for production control.
Plenty of research in the past several years focused on the dispatching rules of batch processing. According to many researchers,
look-ahead batch dispatching rules outperform MBS on waiting times and machine utilization. The look-ahead batching rules
that have been developed are DBH, NACH, MCR, and DJAH. However, these rules do not take the due-date information of wafers
into consideration, and can’t accelerate the wafer’s fabrication that will not be completed before the due-date. This study
will develop a due-date oriented look-ahead batching rule, namely LBCR, that considers the due-date and expects to raise delivery
rates and reduce the average tardiness. Firstly, this study will modify those batching rules to fit the manufacturing environment
of wafer fabrication. There are serial simulation tests on those batching rules under various kinds of factors in terms of
environment, including traffic intensity, product numbers and product mix rate. Finally, this study will compare the five
batching rules on different performance indicators. After the simulation and statistic analysis undertaken, LBCR does outperform
other batch dispatching rules on due-date related performance indicators, such as tardy rate and average tardiness. |
| |
Keywords: | Batching rule Simulation Wafer fabrication |
本文献已被 SpringerLink 等数据库收录! |
|