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Fabrication of ultra high aspect ratio Bragg gratings for optical filter
Authors:Stefano Sardo  Romano Morson  Alessandro Nottola  Giorgio Zuliani  Massimo Gentili  Marco Romagnoli
Affiliation:Pirelli Labs S.p.A., Milan 20126, Italy
Abstract:In this paper a novel process for fabrication of high finesse and large spectral range integrated optics filtering structure for optical communication applications is presented.The technology approach used in the fabrication make use of glass-on-silicon substrates and comprise deep submicron ultra-high aspect ratio Bragg gratings which are deeply buried into the waveguide glass materials.
Keywords:Tri-layer mask  Bragg gratings  High aspect ratio  Deep etching  E-beam
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