Affiliation: | a Department of Electronics and Applied Physics, Tokyo Institute of Technology, J2-69, 4259 Nagatsuta, Midoriku, Yokohama 226-8502, Japan b Frontier Collaborative Research Center, Tokyo Institute of Technology, J2-68, 4259 Nagatsuta, Midoriku, Yokohama 226-8503, Japan c ULSI Process Technology Development Center, Semiconductor Company, Matsushita Electric Industrial Co. Ltd., 19 Nishikujo-kasuga-cho, Minami-ku, Kyoto 601-8413, Japan |