Integrated microfluidic-microoptical systems fabricated by dry etching of soda-lime glass |
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| Authors: | Julien Vieillard Radoslaw Mazurczyk Aude Bouchard Pierre Cremillieu Stanislas Krawczyk |
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| Affiliation: | a LEOM-ECL, 36, av. G. de Collongue, 69134 Ecully, France
b IMEP, 23 rue des Martyrs, BP 257, 38016 Grenoble Cedex 1, France |
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| Abstract: | In the paper, the method of fabrication of monolithically integrated microfluidic-microoptics systems is presented. Soda-lime glass is used as a substrate material, in which the waveguiding optics is fabricated by means of an ion exchange process, whereas the microfluidic channel is manufactured using reactive ion etching technique. Basic optical characteristics of the device are also reported. |
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| Keywords: | Optical integration Dry etching Lab-on-a-chip Microfluidic |
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