Analysis of interface states and series resistance of MIS Schottky diodes using the current-voltage (I-V) characteristics

The purpose of this paper is to analyze interface states in Al/SiO₂/p-Si (MIS) Schottky diodes and determine the effect of SiO₂ surface preparation on the interface state energy distribution. The current-voltage (I-V) characteristics of MIS Schottky diodes were measured at room temperature. From the I-V characteristics of the MIS Schottky diode, ideality factor (n) and barrier height (Φ_B) values of 1.537 and 0.763 eV, respectively, were obtained from a forward bias I-V plot. In addition, the density of interface states (N_ss) as a function of (E_ss-E_v) was extracted from the forward bias I-V measurements by taking into account both the bias dependence of the effective barrier height (Φ_e), n and R_s for the MIS Schottky diode. The diode shows non-ideal I-V behaviour with ideality factor greater than unity. In addition, the values of series resistance (R_s) were determined using Cheung’s method. The I-V characteristics confirmed that the distribution of N_ss, R_s and interfacial insulator layer are important parameters that influence the electrical characteristics of MIS Schottky diodes.