Oxygen chemiluminescence in He plasma as a method for plasma damage evaluation |
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Authors: | AM Urbanowicz D Shamiryan S De Gendt |
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Affiliation: | a IMEC, Kapeldreef 75, B-3001 Leuven, Belgium b Department of Chemistry, Katholieke Univ Leuven, B-3001 Leuven, Belgium |
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Abstract: | We propose a method for evaluating the hydrophilisation degree of low-k films upon plasma damage. The evaluation is based on optical emission spectroscopy analysis of O∗ emission during He plasma exposure of sample in question. The O∗ is presumably desorbed from damaged low-k film by vacuum-ultraviolet radiation from He plasma. The new method correlates well with other methods for plasma damage characterization such as Fourier Transform Infrared Spectroscopy and Water-Vapor Ellipsometric Porosimetry. The presented method gives a unique opportunity to assess the degree of hydrophilisation of low-k films immediately after processing. |
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Keywords: | Low-k dielectrics Plasma damage Hydrophilisation Porous films Helium plasma |
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