Affiliation: | (1) Faculty of Engineering Science, Osaka University, Toyonaka, 560 Osaka, Japan;(2) Research Development Corporation of Japan, Chiyoda, 100 Tokyo, Japan;(3) Institute for Materials Research, Tohoku University, Sendai, 980 Miyagi, Japan;(4) Present address: Hitachi Electronic Co., Yokohama, 244 Kanagawa, Japan;(5) Present address: Toagosei Chemical Industry Co., Minato, 455 Nagoya, Japan;(6) Present address: Furukawa Electric Co., Chiyoda, 100 Tokyo, Japan;(7) Present address: Japan Metals and Chemicals Co., Tsukuba, 305 Ibaraki, Japan |