Axial electron channeling statistical method of site occupancy determination

Multibeams dynamical theory of electron diffraction has been used to calculate the fast electron thickness-integrated probability density on Ti and Al sites in the λ-TiAl phase as a function of the incident electron beam orientation along [100], [110] and [011] zone axes, with the effect of absorption considered. Both of the calculation and experiments show that there are big differences in electron channeling effect for different zone axes or the same axis but with different orientations, so we should choose proper zone axis and suitable incident beam tilting angles when using the axial electron channeling statistical method to determine the site occupancies of impurities. It is suggested to calculate the channeling effect map before the experiments.