MOVPE production reactors for high temperature electronics |
| |
Authors: | H Protzmann B Wachtendorf O Schoen D Schmitz G Strauch H Juergensen |
| |
Affiliation: | (1) AIXTRON AG, Kackertstr. 15-17, D-52072 Aachen, Germany |
| |
Abstract: | For the fabrication of epitaxial films of silicon carbide or the Group III nitrides, high growth temperatures (up to 1700°C)
and fast heating and cooling of the growth environment have been found to be necessary. A range of production systems meeting
these requirements has been designed with different loading capacities. In this paper, we present results from various machines
showing the high quality and excellent homogeneity obtainable for 3C-SiC on Si and on 6H-SiC, as well as GaN on sapphire. |
| |
Keywords: | GaN metalorganic vapor phase epitaxy (MOVPE) multiwafer reactors SiC |
本文献已被 SpringerLink 等数据库收录! |