Acoustic Microscopy in Micrometrology |
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| Authors: | Kuznetsov V S Ogorodnikov S A Preobrazhenskii M N Prokaznikov A V |
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| Affiliation: | (1) Demidov State University, ul. Sovetskaya 14, Yaroslavl, 150000, Russia;(2) Institute of Microelectronics, Russian Academy of Sciences, ul. Universitetskaya 21, Yaroslavl, 150007, Russia |
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| Abstract: | In-depth analysis of the propagation of an acoustic signal excited by a short radio pulse is performed. The signal is reflected from the simple lens of a scanning acoustic microscope, and its power is detected. An expression for V(z) curve (acoustic signature of a material) is derived. It takes into account excitation conditions (delay and recording times of a signal to be detected) and lens parameters. |
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