高透钻面玻璃在线连续镀膜技术研究

使用立式连续直线镀膜生产线,采用真空磁控溅射技术在玻璃表面设计并镀制了Nb2O5/Si O2/Nb2O5/Si O2/CNx多层纳米硬质增透薄膜,并研究其透过率、硬度及理化性能。结果表明:通过引入线性阳极层离子源,控制并形成新的磁控溅射镀膜工艺,钻面玻璃产品的表面硬度达994.8 HV,是普通玻璃的2倍以上;在可见光透过率≥94%,具有一定的增透效果;经过酸/碱/溶剂/热处理后的透过率衰减ΔT0.1%,理化性能优良。

Study on Continuous Coating Technology of High Transmittance Diamond-Face Glass

Using the vertical continuous straight line coating production line and vacuum magnetion sputtering technique,Nb2O5/SiO2/Nb2O5/SiO2/CNx multilayer nano hard anti-reflection film was fabricated on the surface of the glass,and its transmittance,hardness and physical and chemical properties were studied.The results show that by introducing linear anode layer ion source,and and the forming of a new magnetron sputtering coating process,the surface hardness of diamond face glass has reached 994.8 HV,more than 2 times of that of the ordinary glass;more than 94％ of the visible light,can penetrate it,demonstrating good anti-reflection;the attenuation of transmittance is A T ＜ 0.1％ after it was acid / alkali / solvent / heat treated,showing excellent physical and chemical properties.