| MEMS中基于制造工艺的多层材料结构分析 |
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| 引用本文： | 邓斌,刘晓明,邓琼.MEMS中基于制造工艺的多层材料结构分析[J].电子机械工程,2005,21(5):47-50. |
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| 作者姓名： | 邓斌 刘晓明 邓琼 |
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| 作者单位： | 中国电子科技大学机械电子工程学院,四川,成都,610054;中国电子科技大学机械电子工程学院,四川,成都,610054;中国电子科技大学机械电子工程学院,四川,成都,610054 |
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| 摘 要： | 在 MEMS中,由于制造工艺的不同,形成了不同的多层材料结构.因此,在MEMS设计中必须针对多层材料结构形式进行分析.同时,由于它们的功能要求差异和使用环境的不同,必须对其进行必要的结构分析,以最佳的结构性能,最低的制造成本满足使用要求.文中提出MEMS中基于制造工艺的多层材料结构分析的方法.并应用该方法针对加速度微阵列式传感器进行结构分析计算,设计并制造了式样.在ENDVCO2270设备上进行测试,获得62500g的加速度测试值.
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| 关 键 词： | MEMS 多层材料 结构分析 制造过程 |
| 文章编号： | 1008-5300(2005)05-0047-04 |
| 收稿时间： | 2005-04-30 |
| 修稿时间： | 2005年4月30日 |
The Structural Analysis of the Multiple Material on MEMS Based on the Manufacturing Processes |
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| DENG Bin,LIU Xiao-ming and DENG Qiong.The Structural Analysis of the Multiple Material on MEMS Based on the Manufacturing Processes[J].Electro-Mechanical Engineering,2005,21(5):47-50. |
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| Authors: | DENG Bin LIU Xiao-ming and DENG Qiong |
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| Affiliation: | Department of Mechanical-Electro Engineering, University of Electronics Science and Technology of Chinese, Chengdu 610054, China |
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| Abstract: | The different multiple material structure is formed with different manufacturing processes in MEMS. This paper presents the method of the structure analysis for the multiple material based on the different manu- facturing processes in MEMS. Meanwhile, because the difference of their function and environmental, the structure analysis must be done to meet the operation requirement by the optimum performance of the structure and the lowest manufacturing cost. The paper researches this analysis method by which the sample for the mi- cro array sensors of the acceleration have been designed and manufactured. It is tested in the equipment of ENDVCO 2270, the acceleration test value of the 62500g is acquired. |
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| Keywords: | MEMS multiple material structure analysis manufacturing processes |
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