多孔径光束积分激光匀束器理论与设计

分析了多孔径光束积分匀束器的基本原理和设计理论,分别设计了衍射型和成像型微透镜阵列激光匀束器,将高斯光束整形为平顶光束。光线追迹的结果表明,当微透镜阵列的菲涅尔数较大时,两种匀束器都能获得良好的匀束效果,而成像型能比前者提供更好的光束均匀性和边缘坡度。此外,入射光的准直性能会影响匀束效果,当入射光发散角较大,超过微透镜数值孔径时会导致像面光斑出现明显旁瓣,无法实现正常的匀化。

Theory and design of laser beam homogenizer based on multi-aperture beam integrator

The principle and design theory of multi-aperture beam integration homogenizer are analyze.Diffracting and imaging microlens array laser beam homogenizers are designed to convert Gaussian beams into top-hat beams.The raytracing simulations show that both of them have good uniformity when the Fresnel-Number of microlens array is big,and imaging types give better uniformity and edge steepness than former.The collimation of incident beam has influence on beam uniformity.The big divergence of incident beam whic...