| 碲镉汞物理与化学钝化界面的AES研究 |
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| 引用本文： | 史伟民,李冬梅,钱永彪,居建华,王林军,闵嘉华,桑文斌,吴汶海.碲镉汞物理与化学钝化界面的AES研究[J].红外与毫米波学报,2002,21(Z1):23-27. |
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| 作者姓名： | 史伟民 李冬梅 钱永彪 居建华 王林军 闵嘉华 桑文斌 吴汶海 |
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| 作者单位： | 上海大学材料科学与工程学院,上海,201800 |
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| 摘 要： | 采用化学和物理方法分别在Hg1-xCdxTe (MCT)表面制备了阳极氟化膜、CdTe、ZnS和类金刚石薄膜(DLC)钝化层.采用俄歇光谱(AES)和红外透射光谱(IR)研究了这些钝化层与MCT之间的界面特性.结果表明与阳极氟化膜和CdTe膜相比,ZnS和DLC膜能较好地抑制MCT组元的外扩散.ZnS层中的Zn和S 易于向MCT内部扩散,而且发现在ZnS层中有O的存在,这可能是由于ZnS易与空气中水份发生作用所致.而DLC中C向MCT内表面扩散较少.MCT表面沉积DLC薄膜后红外透过率较ZnS有明显的提高.
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| 关 键 词： | HgCdTe 表面钝化 界面. |
| 修稿时间： | 2001年6月12日 |
PHYSICALLY AND CHEMICALLY PASSIVATED INTERFACE OF HgCdTe STUDIED BY AES |
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| SHI Wei-Min,LI Dong-Mei,QIAN Yong-Biao JU Jian-Hua WANG Lin-JunMIN Jia-Hua,SANG Wen-Bin WU Wen-Hai.PHYSICALLY AND CHEMICALLY PASSIVATED INTERFACE OF HgCdTe STUDIED BY AES[J].Journal of Infrared and Millimeter Waves,2002,21(Z1):23-27. |
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| Authors: | SHI Wei-Min LI Dong-Mei QIAN Yong-Biao JU Jian-Hua WANG Lin-JunMIN Jia-Hua SANG Wen-Bin WU Wen-Hai |
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| Abstract: | Native fluoride, CdTe, ZnS and diamond-like carbon (DLC) passivation layers on Hg1-xCdxTe (MCT) were fabricated by chemical and physical technologies. The interface properties between the passivation layers deposited, and well-polished MCT were investigated, respectively, by AES, IR, etc. Compared with the native fluoride and CdTe films, ZnS and DLC films can all prevent the outward diffusion of the components in MCT. However, Zn and S in ZnS layer tend to diffuse into the MCT, and O is detected specially after pulse laser deposition, but C in DLC layer only slightly diffuses into the MCT. In particular, the IR transmission of MCT deposited by DLC is obviously raised and higher than that of MCT deposited by ZnS. |
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| Keywords: | HgCdTe passivation interface |
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