| 硅-蓝宝石压力传感器温度补偿研究 |
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| 引用本文： | 卢超,黄漫国,李欣,郭占社.硅-蓝宝石压力传感器温度补偿研究[J].测控技术,2017,36(4):113-116. |
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| 作者姓名： | 卢超 黄漫国 李欣 郭占社 |
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| 作者单位： | 1. 北京航空航天大学仪器科学与光电工程学院,北京,100191;2. 中航工业北京长城航空测控技术研究所,北京101111;状态监测特种传感技术航空科技重点实验室,北京101111 |
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| 基金项目： | 航空科学基金（20153451023）；中航工业技术创新基金（2013F63447R） |
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| 摘 要： | 针对硅-蓝宝石压力传感器在测量过程中容易受温度影响的问题,提出了一种基于串并联恒定电阻法和分段插值法的温度补偿方法;从硬件补偿电路和软件补偿算法两个方面论述了补偿方法的原理及实现方法,并通过实验验证了该方法的可行性.实验结果表明,最终制成的硅-蓝宝石压力传感器最大相对误差为0.357％,综合误差小于0.129％.
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| 关 键 词： | 高温 硅蓝宝石 压力传感器 温度补偿 |
Research on Temperature Compensation of Silicon on Sapphire Pressure Sensor |
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| LU Chao,HUANG Man-guo,LI Xin,GUO Zhan-she.Research on Temperature Compensation of Silicon on Sapphire Pressure Sensor[J].Measurement & Control Technology,2017,36(4):113-116. |
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| Authors: | LU Chao HUANG Man-guo LI Xin GUO Zhan-she |
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| Abstract: | In order to solve the problem that the silicon on sapphire (SOS) pressure sensor is easily affected by temperature in the process of measurement,the temperature compensation method based on series and parallel constant resistances and piecewise interpolation algorithm is proposed.The principle and realization of compensation method are discussed from two aspects of hardware compensation circuit and software compensation algorithm,and the feasibility of this method is verified by experiments.Finally,the maximum relative error of the SOS pressure sensor is 0.357%,and the integrated error is less than 0.129%. |
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| Keywords: | high temperature silicon on sapphire pressure sensor temperature compensation |
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