| 溶胶-凝胶法制备掺铌的SrTiO_3薄膜 |
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| 引用本文： | 赵苏串,魏敏敏.溶胶-凝胶法制备掺铌的SrTiO_3薄膜[J].电子元件与材料,2000,19(1):5-6,8. |
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| 作者姓名： | 赵苏串 魏敏敏 |
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| 作者单位： | 1. 上海大学,物理系,上海,200436
2. 上海大学材料科学与工程学院,上海,201800 |
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| 摘 要： | 采用溶胶 -凝胶法 ,用醋酸锶、钛酸丁酯、乙醇铌作为前驱体 ,用旋涂法制备掺铌钛酸锶多晶薄膜。用醋酸作为醋酸锶溶剂 ,并用丙三醇作为辅助溶剂 ,溶胶浓度及黏度均可在较大范围内调节。经 6 0 0℃热处理后薄膜转化为钙钛矿结构 ,扫描俄歇电子显微镜所做表面形貌与元素分析表明薄膜均匀、无裂纹、表面光滑、晶粒细小。
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| 关 键 词： | 溶胶-凝胶法 钛酸锶薄膜 介质薄膜 |
| 文章编号： | 1001-2028(2000)01-0005-02 |
Preparation of Nb-doped SrTiO3 thin film by the sol-gel process. |
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| ZHAO Su-chuan,WEI Min-min.Preparation of Nb-doped SrTiO3 thin film by the sol-gel process.[J].Electronic Components & Materials,2000,19(1):5-6,8. |
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| Authors: | ZHAO Su-chuan WEI Min-min |
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| Abstract: | In Chinese Nb doped SrTiO 3 thin film of perovskite structure is fabricated by sol gel process Heat treat temperature is over 600 ℃, strontium acetate, titanium terabutoxide, niobium ethoxide are used as starting materials The viscosity of the solution can be controlled more easily by selecting both acetic and glycerol as the solvent of strontium acetate The film is fine, homogeneous, dense, smooth and crack free (6 refs ) |
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| Keywords: | sol gel process Nb doped SrTiO_ 3 dielectric film |
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