| SnO2气敏元件敏感性能的研究 |
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| 引用本文： | 宋明歆,殷景华.SnO2气敏元件敏感性能的研究[J].哈尔滨理工大学学报,2005,10(4):19-21. |
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| 作者姓名： | 宋明歆 殷景华 |
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| 作者单位： | 哈尔滨理工大学,应用科学学院,黑龙江,哈尔滨,150080;哈尔滨理工大学,应用科学学院,黑龙江,哈尔滨,150080 |
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| 摘 要： | 为了探讨具有优良性能的SnO2气敏元件的研制方法，依据半导体晶界气敏理论．以SnO2为基体材料，采用烧结型工艺和溶胶一凝胶方法制备出了气敏器件，并对该元件的气敏特性进行了测试,结果表明，采用溶胶一凝胶方法制备的气敏元件具有较高的灵敏度和低电阻等特点，对氢气响应时间可以达到5s.
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| 关 键 词： | 气体传感器 灵敏度 二氧化锡 溶胶-凝胶法 |
| 文章编号： | 1007-2683(2005)04-0019-03 |
| 修稿时间： | 2004年12月10 |
Study on the Sensibility Characteristics of SnO2 Gas Sensors |
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| SONG Ming-xin,YIN Jing-hua.Study on the Sensibility Characteristics of SnO2 Gas Sensors[J].Journal of Harbin University of Science and Technology,2005,10(4):19-21. |
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| Authors: | SONG Ming-xin YIN Jing-hua |
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| Abstract: | In order to discuss the preparation of high-performance SnO_2 gas sensors,according to the gas sensibility theory of semiconductor grain boundary the gas sensor has been prepared by using of sinter process and solgel with the substrate material SnO_2_,and the sensibility characteristics of it have been tested.The results show that gas sensors prepared by using of sol-gel have not only the higher sensibility but also lower resistance,and the response time to H_2 gets to 5s. |
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| Keywords: | gas sensor sensibility SnO_2 sol-gel |
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