基于MEMS存储器中二维驱动机构数值模型分析与实验

分析了MEMs数据存储器机构中柔性弹簧的线性大位移驱动特性，提出了一种等效数值模型，并利用该模型等效替换数据存储器驱动机构的关键部位，保留了MEMS数据存储器驱动机构的实际工作特性，并在此基础上将驱动机构转换成质量块和弹簧结构两种单元形式，解决了驱动机构中相对小尺寸有限元建模的问题，大大减少了单元数量．通过设计实验系统进行对比验证，驱动仿真分析结果与实验结果具有良好的吻合性，验证了该等效过程及模型的正确性．为MEMS数据存储器驱动机构的开发提供了理论设计和实验参考．

Numerical Analysis and Experiment Research of the Structure Model for 2-Dementional Micro-Actuator in MEMS-Based Data Storage

By analyzing the large linear displacement characteristics of the fold flexure in MEMS-based data storage,a new equivalent numerical model was proposed to replace the key part of micro-actuator in data storage,which remained the actual characteristics of the MEMS-based data storage micro-actuators, and then transform it into finite element model (FEM) which combined by masses and spring structures. The difficulties in relative small size FEM were solved, and the number of elements was largely reduced. An experiment system was designed to detect the correctness of the simulation based on FEM,simulation results were in good accord with the experimental ones. A valuable numerical and experimental references were offered for the exploitation of micro-actuator in MEMS-based data storage.