| 氮分压对氮化锆薄膜颜色影响规律的研究 |
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| 引用本文： | 李新领,孙维连,牛建钢.氮分压对氮化锆薄膜颜色影响规律的研究[J].真空与低温,2004,10(4):215-217. |
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| 作者姓名： | 李新领 孙维连 牛建钢 |
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| 作者单位： | 河北农业大学,机电工程学院,河北,保定,071001 |
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| 摘 要： | 采用QMS200质谱仪进行镀膜过程中的气氛监控,通过俄歇电子能谱分析了氮气分压与Zr-N薄膜中氮含量的关系;通过Zr-N薄膜颜色的测量得出了氮分压与薄膜颜色的关系.
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| 关 键 词： | 氮化锆 颜色 质谱仪 |
| 文章编号： | 1006-7086(2004)04-0215-03 |
| 修稿时间： | 2004年7月12日 |
STUDY ON COLOR INFLUENCING REGULATION OF NITROGEN PARTIAL PRESSURE ON ZIRCONIUM NITRIDE FILMS |
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| LI Xin-ling,SUN Wei-lian,NIU Jian-gang.STUDY ON COLOR INFLUENCING REGULATION OF NITROGEN PARTIAL PRESSURE ON ZIRCONIUM NITRIDE FILMS[J].Vacuum and Cryogenics,2004,10(4):215-217. |
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| Authors: | LI Xin-ling SUN Wei-lian NIU Jian-gang |
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| Abstract: | The QMS200 Mass Spectrometer is taken to monitoring the gas in the process of filming. Auger electron spectroscopy is used to analyze the relation between the Nitrogen Partial Pressure and the Nitrogen content in the film. By measuring the Zr-N film, the relation between Nitrogen Partial Pressure and the color of the film is found. |
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| Keywords: | Zirconium Nitride color mass spectrometer |
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