Comparative study on early stages of film growth for transparent conductive oxide films deposited by dc magnetron sputtering |
| |
Authors: | Yasushi Sato Norihiro Ito |
| |
Affiliation: | Graduate School of Science and Engineering, Aoyama Gakuin University, 5-10-1 Fuchinobe, Sagamihara, Kanagawa 229-8558, Japan |
| |
Abstract: | Early stages of film growth were investigated on three different kinds of representative transparent conductive oxide films including tin doped indium oxide (ITO), indium zinc oxide (IZO) and gallium doped zinc oxide (GZO) films deposited on unheated alkali free glass substrates by dc magnetron sputtering. The variations in sheet resistance, film coverage and average surface roughness showed clearly that ITO and GZO films possessed Volmer-Weber growth mode. In contrast, the evolution of islands is not clearly observed for IZO film. The nucleation density of IZO film is considered to be much higher than that of ITO and GZO films. |
| |
Keywords: | Transparent conductive oxide Indium oxide Indium zinc oxide Zinc oxide Volmer Weber Dc magnetron sputtering |
本文献已被 ScienceDirect 等数据库收录! |